Emerging semiconductor technology (Record no. 1498)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00623pam a2200193 a 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 0803104596 |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 EME |
| 245 00 - TITLE STATEMENT | |
| Title | Emerging semiconductor technology |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Philadelphia, PA : |
| Name of publisher | American Society for Testing and Materials, |
| Year of publication | c1987. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | 704 p. : |
| Other physical details | ill. ; |
| 490 ## - SERIES STATEMENT | |
| Series statement | STP 960 |
| 500 ## - GENERAL NOTE | |
| General note | Papers presented at the Fourth International Symposium on Semiconductor Processing. |
| 500 ## - GENERAL NOTE | |
| General note | "ASTM publication code number (PCN) 04-960000-46." |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Semiconductor industry |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Semiconductors |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Gupta, D. C. |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Langer, Paul H. |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Books |
| Withdrawn status | Lost status | Collection code | Home library | Current library | Shelving location | Date acquired | Full call number | Accession Number | Koha item type |
|---|---|---|---|---|---|---|---|---|---|
| Non-fiction | Ichemc Library | Ichemc Library | General Stacks | 07/07/2015 | 621.38152 EME | 003282 | Books |