Emerging semiconductor technology :
Material type:
TextPublication details: Philadelphia, PA : American Society for Testing and Materials, c1987.Description: 704 p. : illISBN: - 0803104596
- 621.3815/2 EME
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Ichemc Library General Stacks | Non-fiction | 621.3815/2 EME (Browse shelf(Opens below)) | Not for loan | 003281 |
Total holds: 0
Papers presented at the Fourth International Symposium on Semiconductor Processing.
"ASTM publication code number (PCN) 04-960000-46."
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