TY  - BOOK
AU  - Murarka,S.P.
TI  - Metallization :theory and practice for VLSI and ULSI
SN  - 0750690011 (acidfree paper)
U1  - 621.395 MUR 
PY  - 1993///
CY  - Boston 
PB  - Butterworth-Heinemann
KW  - Integrated circuits
KW  - Metallizing
ER  -