| 000 | 00402pam a2200145 a 4500 | ||
|---|---|---|---|
| 020 | _a0750690011 (acidfree paper) | ||
| 082 | 0 | 0 | _a621.395 MUR |
| 100 | 1 | _aMurarka, S. P. | |
| 245 | 1 | 0 | _aMetallization :theory and practice for VLSI and ULSI |
| 260 |
_aBoston _bButterworth-Heinemann, _cc1993. |
||
| 300 |
_avi, 250 p. : _bill. ; |
||
| 650 | 0 | _aIntegrated circuits | |
| 650 | 0 | _aMetallizing. | |
| 942 | _cBK | ||
| 999 |
_c1493 _d1493 |
||