000 00402pam a2200145 a 4500
020 _a0750690011 (acidfree paper)
082 0 0 _a621.395 MUR
100 1 _aMurarka, S. P.
245 1 0 _aMetallization :theory and practice for VLSI and ULSI
260 _aBoston
_bButterworth-Heinemann,
_cc1993.
300 _avi, 250 p. :
_bill. ;
650 0 _aIntegrated circuits
650 0 _aMetallizing.
942 _cBK
999 _c1493
_d1493