| 000 | 00623pam a2200193 a 4500 | ||
|---|---|---|---|
| 020 | _a0803104596 | ||
| 082 | 0 | 0 | _a621.38152 EME |
| 245 | 0 | 0 | _aEmerging semiconductor technology |
| 260 |
_aPhiladelphia, PA : _bAmerican Society for Testing and Materials, _cc1987. |
||
| 300 |
_a704 p. : _bill. ; |
||
| 490 | _aSTP 960 | ||
| 500 | _aPapers presented at the Fourth International Symposium on Semiconductor Processing. | ||
| 500 | _a"ASTM publication code number (PCN) 04-960000-46." | ||
| 650 | 0 | _aSemiconductor industry | |
| 650 | 0 | _aSemiconductors | |
| 700 | 1 | _aGupta, D. C. | |
| 700 | 1 | _aLanger, Paul H. | |
| 942 | _cBK | ||
| 999 |
_c1498 _d1498 |
||