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Metallization :theory and practice for VLSI and ULSI

Murarka, S. P.

Metallization :theory and practice for VLSI and ULSI - Boston Butterworth-Heinemann, c1993. - vi, 250 p. : ill. ;

ISBN: 0750690011 (acidfree paper)

Subjects--Topical Terms:
Integrated circuits
Metallizing.

Dewey Class. No.: 621.395 MUR

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Metallization :theory and practice for VLSI and ULSI

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