Metallization :theory and practice for VLSI and ULSI (Record no. 1493)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00402pam a2200145 a 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 0750690011 (acidfree paper) |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.395 MUR |
| 100 1# - MAIN ENTRY--AUTHOR NAME | |
| Personal name | Murarka, S. P. |
| 245 10 - TITLE STATEMENT | |
| Title | Metallization :theory and practice for VLSI and ULSI |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Boston |
| Name of publisher | Butterworth-Heinemann, |
| Year of publication | c1993. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | vi, 250 p. : |
| Other physical details | ill. ; |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Integrated circuits |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Metallizing. |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Books |
| Withdrawn status | Lost status | Collection code | Home library | Current library | Shelving location | Date acquired | Full call number | Accession Number | Koha item type |
|---|---|---|---|---|---|---|---|---|---|
| Non-fiction | Ichemc Library | Ichemc Library | General Stacks | 07/07/2015 | 621.395 MUR | 002382 | Books |