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Emerging semiconductor technology

Contributor(s): Material type: TextSeries: STP 960Publication details: Philadelphia, PA : American Society for Testing and Materials, c1987.Description: 704 p. : illISBN:
  • 0803104596
Subject(s): DDC classification:
  • 621.38152 EME
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Cover image Item type Current library Home library Collection Shelving location Call number Materials specified Vol info URL Copy number Status Notes Date due Barcode Item holds Item hold queue priority Course reserves
Books Ichemc Library General Stacks Non-fiction 621.38152 EME (Browse shelf(Opens below)) Available 003282
Total holds: 0

Papers presented at the Fourth International Symposium on Semiconductor Processing.

"ASTM publication code number (PCN) 04-960000-46."

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