Metallization :theory and practice for VLSI and ULSI

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TextPublication details: Boston Butterworth-Heinemann, c1993.Description: vi, 250 p. : illISBN:

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Cover image	Item type	Current library	Home library	Collection	Shelving location	Call number	Materials specified	Vol info	URL	Copy number	Status	Notes	Date due	Barcode	Item holds	Item hold queue priority	Course reserves
	Books	Ichemc Library General Stacks		Non-fiction		621.395 MUR (Browse shelf(Opens below))					Available			002382

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